Electron cyclotron resonance ion source

• Main Authors: YUAN ZHONGXI, REN HAITAO, LV PENGNAN, GUO ZHIYU, PENG SHIXIANG
• Format: Patent
• Language: Chinese; English
• Published: 06.07.2011
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY

The invention provides an electron cyclotron resource ion source, in particular relates to a novel structured all-permanent magnet high-current electron cyclotron resonance (ECR) ion source capable of directly observing internal discharge of an ion source. In the electron cyclotron resource ion source, quartz glass with high light transmission is adopted as a discharge chamber; microwave leakage caused by the quartz glass can be shielded by a special structured metal shell which is arranged outside the quartz glass and provided with a window; and a magnetic field required by electron cyclotron is generated by a plurality of separated permanent magnetic rings, and a plurality of gaps are formed among the rings. Therefore, through the window of a shielding shell, gaps among the permanent magnetic rings and the transmitting quartz glass, the whole process occurring in the discharge chamber and various states of plasma can be observed in real time uninterruptedly at a plurality of angles in a plurality of positio