Gas distribution plate and treatment chamber equipped therewith
The invention provides a gas distribution plate and a treatment chamber equipped therewith, wherein the manufacture time is shortened and the manufacture cost is reduced.The gas distribution plate comprises a first hole formed on a first surface,through holes extending from the first hole to a secon...
Saved in:
Main Authors | , , , , , |
---|---|
Format | Patent |
Language | Chinese English |
Published |
01.06.2011
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Be the first to leave a comment!