Composite micro-electro-mechanical system (MEMS) high-temperature resistant ultrahigh-pressure sensor

• Main Authors: ZHAO LIBO, YUAN GUOYING, MENG XIAWEI, GUO XIN, ZHAO YULONG, JIANG ZHUANGDE
• Format: Patent
• Language: Chinese; English
• Published: 13.04.2011
• Subjects: MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; PHYSICS; TESTING

The invention discloses a composite micro-electro-mechanical system (MEMS) high-temperature resistant ultrahigh-pressure sensor. The sensor comprises a base, a silicon beam sensitive element, a high-temperature adapter plate and a shell, wherein the shell is assembled on the base; the silicon beam sensitive element is connected to a high-temperature cable through a gold wire lead and the high-temperature adapter plate and is connected with an external circuit; the base is combined with a foundation support through a pressure-bearing elastic element; the middle of the pressure-bearing elastic element is provided with a circular membrane which is provided with a dowel bar; the silicon beam sensitive element has an E-shaped cup structure of which the middle is provided with a measuring island; the silicon beam sensitive element is assembled on the pressure-bearing elastic element; the measuring island is contacted with the dowel bar; pressure is applied to the circular membrane so as to deform the circular membr