Coating compositions for use with an overcoated photoresist
Coating compositions for use with an overcoated photoresist are provided where the coating composition comprises a resin containing cyanurate groups and hydrophobic groups. The coating composition can enhance resolution of an overcoated photoresist relief image.
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Main Authors | , , , , , |
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Format | Patent |
Language | Chinese English |
Published |
05.01.2011
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Subjects | |
Online Access | Get full text |
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Summary: | Coating compositions for use with an overcoated photoresist are provided where the coating composition comprises a resin containing cyanurate groups and hydrophobic groups. The coating composition can enhance resolution of an overcoated photoresist relief image. |
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Bibliography: | Application Number: CN201010233728 |