Scribe apparatus and method thereof of cutting object by sustenance contactless flatness

• Main Authors: DO JIN-YEONG, YANG HEEUL
• Format: Patent
• Language: Chinese; English
• Published: 03.10.2012
• Subjects: CHEMISTRY; CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GLASS; MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES; METALLURGY; MINERAL OR SLAG WOOL; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS; TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE

A scribing head apparatus having a function of maintaining a flatness of an object to be cut in a non-contact manner and a scribing method using the same are disclosed. The scribing head apparatus, adapted to sequentially cut both surfaces of the object while moving in X-axis and Y- axis directions, includes first and second head drive modules provided above and below the object to be cut, respectively, and adapted to be moved toward the object so as to perform a cutting operation on the object while coming into contact with the object, and first and second flatness maintaining modules provided above and below the object to be cut, respectively, and serving to maintain a flatness of a cutting section of the object via air floating of the object. Each flatness maintaining module comprises a flatness maintaining plate provided with a plurality of nozzles arranged therein for injecting air to the object from above and from below respectively; and an air supply source for supplying high-pressure air to the flatne