Preparation technology for growing ZnO nanorod arrays on ITO PET film

• Main Authors: HU ANZHENG, HUANG XINTANG
• Format: Patent
• Language: Chinese; English
• Published: 11.08.2010
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSESC01D OR C01F; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; INORGANIC CHEMISTRY; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The invention provides a preparation technology for preparing ZnO nanorod arrays (ZnO-NRDs) on flexible tin indium oxide conducting polyester film (ITO PET) film. A magnetron sputtering device is used for pre-preparing ZnO crystal seed on flexible ITO PET, and ZnO-NRDs are grown out in large area with low temperature liquid polymerization process; and the preparation technology can well solve the problem that ZnO-NRDs cannot be grown out on ITO PET directly, and the degree of density and substrate adhesive force of ZnO-NRDs can be adjusted according to requirements. One-dimensional ZnO-NRDs can be prepared on ITO PET and can be widely applied to multiple fields such as nanometer electronics, nanometer optoelectronics, and in particular to flexible electrochromic device and the like.