Non-equilibrium magnetron-sputtering rare-earth multivariate graphite composite film and preparation method thereof

• Main Authors: CHEN PENGBO, WANG ZUOPING, LI HAIJUN, ZHANG JINGBIN, HE YUAN, SUN ZHANGTAO
• Format: Patent
• Language: Chinese; English
• Published: 30.12.2009
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The invention discloses a non-equilibrium magnetron-sputtering rare-earth multi-element graphite composite film, which consists of an ion infiltrating metal layer, a Cr/RE transition layer, a C/Cr-RE gradient layer and a C/Cr-RE multi-element composite layer compounded in turn, wherein the component...