Test device for semiconductor device

A testing device of a semiconductor device includes a first board having a plurality of openings; a frame body provided in the openings, the frame body having a frame in which a plurality of probe needles is provided; and a plurality of second boards provided perpendicular to the first board in the...

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Bibliographic Details
Main Authors KOSHINUMA SUSUMU, SHIMABAYASHI KAZUHIKO, SHIRAKAWA MASAYOSHI, MARUYAMA YUJI, NAKASHIRO TAKAYUKI, TASHIRO KAZUHIRO, GOTOH SHIGERU
Format Patent
LanguageChinese
English
Published 09.12.2009
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
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Summary:A testing device of a semiconductor device includes a first board having a plurality of openings; a frame body provided in the openings, the frame body having a frame in which a plurality of probe needles is provided; and a plurality of second boards provided perpendicular to the first board in the periphery of the openings, the second boards being connected to the first board; wherein the probe needles pierce the frame so as to be connected to the second boards from the periphery of the frame body via the openings.
Bibliography:Application Number: CN2007851053