Method for monitoring gas leakage of reaction chamber in real time
The invention provides a method for monitoring the gas leakage of a reaction chamber in real time, which uses a full-wavelength spectrometer to monitor the condition of the gas leakage of the reaction chamber in real time. After the full-wavelength spectrometer is used, if the gas leakage of the rea...
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Main Authors | , |
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Format | Patent |
Language | Chinese English |
Published |
02.12.2009
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Subjects | |
Online Access | Get full text |
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