Method for monitoring gas leakage of reaction chamber in real time

• Main Authors: HUANG HAIDONG, DUAN XIMING
• Format: Patent
• Language: Chinese; English
• Published: 02.12.2009
• Subjects: MEASURING; PHYSICS; TESTING; TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES; TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR

The invention provides a method for monitoring the gas leakage of a reaction chamber in real time, which uses a full-wavelength spectrometer to monitor the condition of the gas leakage of the reaction chamber in real time. After the full-wavelength spectrometer is used, if the gas leakage of the rea...