Method for monitoring gas leakage of reaction chamber in real time

• Main Authors: HUANG HAIDONG, DUAN XIMING
• Format: Patent
• Language: Chinese; English
• Published: 02.12.2009
• Subjects: MEASURING; PHYSICS; TESTING; TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES; TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR

The invention provides a method for monitoring the gas leakage of a reaction chamber in real time, which uses a full-wavelength spectrometer to monitor the condition of the gas leakage of the reaction chamber in real time. After the full-wavelength spectrometer is used, if the gas leakage of the reaction chamber occurs, the full-wavelength spectrometer can detect a CN spectrum with the wavelength of 387nm (CN is a reaction product of N2 leaked into the reaction chamber and C in the reaction chamber). Through the detection of lightwave signals of the reaction chamber, the reaction chamber can be monitored for gas leakage or not in real time. Through the real-time monitoring of the gas leakage of the reaction chamber, the stability of a processing process can be monitored, abnormal risks of products can be reduced and even avoided and the quality of the products is enhanced.