Method for monitoring gas leakage of reaction chamber in real time
The invention provides a method for monitoring the gas leakage of a reaction chamber in real time, which uses a full-wavelength spectrometer to monitor the condition of the gas leakage of the reaction chamber in real time. After the full-wavelength spectrometer is used, if the gas leakage of the rea...
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Main Authors | , |
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Format | Patent |
Language | Chinese English |
Published |
02.12.2009
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Subjects | |
Online Access | Get full text |
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Summary: | The invention provides a method for monitoring the gas leakage of a reaction chamber in real time, which uses a full-wavelength spectrometer to monitor the condition of the gas leakage of the reaction chamber in real time. After the full-wavelength spectrometer is used, if the gas leakage of the reaction chamber occurs, the full-wavelength spectrometer can detect a CN spectrum with the wavelength of 387nm (CN is a reaction product of N2 leaked into the reaction chamber and C in the reaction chamber). Through the detection of lightwave signals of the reaction chamber, the reaction chamber can be monitored for gas leakage or not in real time. Through the real-time monitoring of the gas leakage of the reaction chamber, the stability of a processing process can be monitored, abnormal risks of products can be reduced and even avoided and the quality of the products is enhanced. |
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Bibliography: | Application Number: CN2008197800 |