Device for realizing temperature equalization of matrix in preparation process of diamond film spherical crown

• Main Authors: LU WENZHUANG, ZUO DUNWEN, LI DUOSHENG, CHEN RONGFA, SUN YEBIN
• Format: Patent
• Language: Chinese; English
• Published: 20.07.2011
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

Aiming at the shortcomings that in the cooling process, the cooling system in traditional diamond film preparation causes temperature gradient on the surface of a matrix due to non-uniform cooling of the growing matrix of the diamond film, the prepared diamond film has major stress defect and structural defect, and the like, the invention discloses a device for realizing temperature equalization of the matrix in the preparation process of a diamond film spherical crown so as to meet the requirement of preparing high-quality diamond film spherical crown at present. The device uses de-ionized water as coolant and conducts cooling by a cooling system, thus providing a novel and effective cooling method for CVD, PVD and other methods for preparing film crystals, coatings and the like. The device is especially applicable to the preparation of the high-quality diamond film spherical crown, and has the advantages of simple manufacture, high efficiency, low cost, no pollution to environment, environmental protection