Workpiece handling scan arm for ion implantation system

The present invention provides an ion implantation apparatus, system, and method for connecting and disconnecting a workpiece holder from a scan arm. A twist head is provided, wherein an electrostatic chuck is operable to be mounted, wherein one or more rotating and non-rotating members associated w...

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Bibliographic Details
Main Authors PATHAK SHANTANU, PHARAND MICHEL, LAFONTAINE MARVIN, MITCHELL ROBERT, EIRIKSSON ARI, ARSENAULT WAYNE, PUROHIT ASHWIN, WEED STEVE, BECKEL DONOVAN
Format Patent
LanguageChinese
English
Published 07.09.2011
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:The present invention provides an ion implantation apparatus, system, and method for connecting and disconnecting a workpiece holder from a scan arm. A twist head is provided, wherein an electrostatic chuck is operable to be mounted, wherein one or more rotating and non-rotating members associated with one or more of the twist head and electrostatic chuck have one or more dynamic fluid seals associated therewith. The electrostatic chuck is further operable to be removed from the twist head without disconnecting the one or more dynamic fluid seals.
Bibliography:Application Number: CN2007830643