Plate cooling apparatus and heat processing system

An apparatus for cooling a board-shaped body and a heat treatment system are provided to uniformly cool off a heat treated board-shaped body. An apparatus for cooling a board-shaped body comprises the following units. A board-shaped body arranging unit(20) is equipped with a ventilation unit arrangi...

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Bibliographic Details
Main Author KANDA TOSHIRO
Format Patent
LanguageChinese
English
Published 27.02.2013
Subjects
CHEMISTRY
GLASS
MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
METALLURGY
MINERAL OR SLAG WOOL
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Summary:An apparatus for cooling a board-shaped body and a heat treatment system are provided to uniformly cool off a heat treated board-shaped body. An apparatus for cooling a board-shaped body comprises the following units. A board-shaped body arranging unit(20) is equipped with a ventilation unit arranging part(30) consisting of a plurality of ventilation units(40) at some distance from each other. When a board-shaped body is taken out, a fork pole(13) of a transfer loading unit(11) requires to be inserted into an operating region(25) located on the ventilation unit arranging part. A supporting pin(23) increases the flux of the air passing through a substrate in order to improve cooling efficiency.
Bibliography:Application Number: CN200910001280