Preparation of AZO target material for thin-film solar cell

• Main Authors: WEI YU, MA JIANKAI, KANG MINGSHENG, ZHANG DEFENG, WU XIHONG, ZHONG JINGSHUN, YUE XUEJUN
• Format: Patent
• Language: Chinese; English
• Published: 11.08.2010
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The invention relates to a method for preparing an aluminum zinc oxide target material for a film solar cell. The method comprises the following steps: (1) zinc salt and aluminum salt are used as raw materials, added with pure water and dissolved; the PH value of the solution is regulated between 7.0 and 10.5; under the hydrothermal condition, temperature is controlled between 90 and 140 DEG C; and the reaction time is between 1.0 and 2.0 hours; (2) the solution is filtered in order to separate a product from a mother solution; the product is washed by pure water and is dried to obtain an aluminum zinc oxide powder body; (3) the obtained powder body is calcined for 2 hours at temperature of between 400 and 550 DEG C; and (4) the powder body obtained in the step (3) is put into a vacuum hot-pressing furnace, vacuumized to 1 to 100Pa, pressurized to between 50 and 100 MPa, slowly heated, kept at the temperature of between 1,200 and 1,400 DEG C, sintered for 2 to 5 hours and slowly cooled to prepare the aluminum