Strain type micro-nano-scale micro-nano displacement sensor

The invention provides a strain type micro-nano class micro-nano displacement transducer. The micro-nano displacement transducer is characterized by having a detection unit which is formed by rigid rod bodies and flexible hinges and is provided with a lever type displacement first-level amplificatio...

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Bibliographic Details
Main Authors YU YONG, SONG BO, GE YUNJIAN, YANG WEICHAO
Format Patent
LanguageChinese
English
Published 08.12.2010
Subjects
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
TESTING
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Summary:The invention provides a strain type micro-nano class micro-nano displacement transducer. The micro-nano displacement transducer is characterized by having a detection unit which is formed by rigid rod bodies and flexible hinges and is provided with a lever type displacement first-level amplification mechanism and a displacement second-level amplification mechanism. Through multi-level amplification, the micro-nano displacement transducer allows a strain piece on an elastic body to detect the movement of a detecting object, and acquires detection results by external signal acquisition and processing equipment. The displacement transducer has the advantages of high integration, small volume, low energy consumption, high precision, low cost, simple structure, high sensitivity, easy labelingand good reliability.
Bibliography:Application Number: CN20081244431