Lithographic apparatus and device manufacturing method
A liquid supply system for an immersion lithographic apparatus provides a laminar flow of immersion liquid (500) between a final element of the projection system and a substrate. A control system minimizes the chances of overflowing and an extractor (228) includes an array of outlets (224) configure...
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Main Authors | , , , , , , , |
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Format | Patent |
Language | Chinese English |
Published |
26.12.2012
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Subjects | |
Online Access | Get full text |
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Summary: | A liquid supply system for an immersion lithographic apparatus provides a laminar flow of immersion liquid (500) between a final element of the projection system and a substrate. A control system minimizes the chances of overflowing and an extractor (228) includes an array of outlets (224) configured to minimize vibrations. |
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Bibliography: | Application Number: CN200810092608 |