Method and device for detecting optical element laser damage threshold

The invention provides a laser damage threshold detection method of optical component and a relative device, which utilizes the laser generated by a laser device to radiate on the surface of an objectoptical component to generate fluorescent light, to detect the surface morphology change of the opti...

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Bibliographic Details
Main Authors GAO ZHIXING, TANG XIUZHANG, XIANG YIHUAI
Format Patent
LanguageChinese
English
Published 16.06.2010
Subjects
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Summary:The invention provides a laser damage threshold detection method of optical component and a relative device, which utilizes the laser generated by a laser device to radiate on the surface of an objectoptical component to generate fluorescent light, to detect the surface morphology change of the optical component, wherein the laser device is KrF laser, and the invention detects the distortion of surface fluorescent light strength distribution on the optical surface to detect the surface morphology change of the optical component. The invention can directly detect damage generation and develop,with wide application for surface damage online tests on ultraviolet optical component and high sensitivity.
Bibliography:Application Number: CN2008107917