Semiconductor device testing apparatus, testing method and method for manufacturing the testing apparatus
The invention discloses a testing device and a testing method of a semiconductor element, and a manufacturing method of the testing device. The testing device of the semiconductor element comprises a basal plate and an electric high molecular elastic component. The electric high molecular elastic co...
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Main Authors | , , , , |
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Format | Patent |
Language | Chinese English |
Published |
25.06.2008
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Subjects | |
Online Access | Get full text |
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Summary: | The invention discloses a testing device and a testing method of a semiconductor element, and a manufacturing method of the testing device. The testing device of the semiconductor element comprises a basal plate and an electric high molecular elastic component. The electric high molecular elastic component is arranged on the basal plate. receiving space is defined through the electric high molecular elastic component, and is used for receiving the electric bump of the semiconductor component , so as to test the semiconductor component . |
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Bibliography: | Application Number: CN20061167575 |