Semiconductor device testing apparatus, testing method and method for manufacturing the testing apparatus

The invention discloses a testing device and a testing method of a semiconductor element, and a manufacturing method of the testing device. The testing device of the semiconductor element comprises a basal plate and an electric high molecular elastic component. The electric high molecular elastic co...

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Bibliographic Details
Main Authors ADU LAZHA, WANG ZHIJIAN, MA CHAOHUI, WANG ZHIPING, ZHOU HUIXING
Format Patent
LanguageChinese
English
Published 25.06.2008
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
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Summary:The invention discloses a testing device and a testing method of a semiconductor element, and a manufacturing method of the testing device. The testing device of the semiconductor element comprises a basal plate and an electric high molecular elastic component. The electric high molecular elastic component is arranged on the basal plate. receiving space is defined through the electric high molecular elastic component, and is used for receiving the electric bump of the semiconductor component , so as to test the semiconductor component .
Bibliography:Application Number: CN20061167575