Heat treatment oven, panel display element production device, method and panel display element

• Main Author: LEE SEONG-HYEUN,LEE WON-YOUNG,YOO CHAE-WUN,SIN SUNG-HYUP,KIM PYEONG-UK
• Format: Patent
• Language: English
• Published: 10.10.2007
• Subjects: ADVERTISING; BASIC ELECTRIC ELEMENTS; BLASTING; CRYPTOGRAPHY; DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS,IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KINDOF FURNACE; DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING; DISPLAY; DISPLAYING; EDUCATION; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; FREQUENCY-CHANGING; FURNACES; FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; HEATING; KILNS; LABELS OR NAME-PLATES; LIGHTING; MECHANICAL ENGINEERING; NON-LINEAR OPTICS; OPEN SINTERING OR LIKE APPARATUS; OPTICAL ANALOGUE/DIGITAL CONVERTERS; OPTICAL LOGIC ELEMENTS; OPTICS; OVENS; PHYSICS; PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS; RETORTS; SEALS; SIGNS; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; WEAPONS

A heat treatment furnace for manufacturing a flat display panel, a flat display panel manufacturing apparatus including the same, a manufacturing method of the same, and a flat panel display device using the same are provided to improve performance of a material layer by lowering resistance of the material layer. A heat treatment furnace includes a magnetron(301), a waveguide(302), and a discharge tube(305). The magnetron is formed to generate microwaves. The waveguide is formed to transmit the microwaves generated from the magnetron. The discharge tube is formed to generate plasma by using the microwaves transmitted through the waveguide and gas supplied through a gas supply unit. The discharge tube is formed to irradiate the plasma onto a structure for manufacturing a flat panel display device.