High oxidation resistant hard coating for cutting tools

• Main Author: ENDRINO JOSE,DERFLINGER VOLKER,GEY CHRISTOPH
• Format: Patent
• Language: English
• Published: 03.10.2007
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

An inventive workpiece features on at least parts of its surface a wear resistant hard coating comprising the following composition Al1-a-b-c-d Cra Xb SicBd Z, where x is at least one element from Nb, Mo, W or Ta; Z is one element or compound from N, C, CN, NO, CO, CNO; and 0.2 <= a <= 0.5; 0.01 <= b <= 0.2; 0 <= c <= 0.1 ; 0 <= d <= 0.1. Further a PVD process for depositing such a wear resisitant coating is disclosed whereby at least one workpiece is installed in a vacuum coating system and said system is operated in a low pressure argon atmosphere utilizing at least two metal or metal alloy targets with at least temporarily addition of a reactive gas.