Apparatus and method for coating polyimide layer

• Main Author: CHO KI DU,KIM BONG CHUL,LEE HUI JAE,KIM SUNG JA,SEO HWANG UN,CHO HANG SUP,KIM EUN MI
• Format: Patent
• Language: English
• Published: 03.10.2007
• Subjects: CORRECTION OF TYPOGRAPHICAL ERRORS; DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING; FREQUENCY-CHANGING; i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; LINING MACHINES; NON-LINEAR OPTICS; OPTICAL ANALOGUE/DIGITAL CONVERTERS; OPTICAL LOGIC ELEMENTS; OPTICS; PERFORMING OPERATIONS; PHYSICS; PRINTING; SELECTIVE PRINTING MECHANISMS; STAMPS; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; TRANSPORTING; TYPEWRITERS

An apparatus for coating polyimide layer includes a print table, an inkjet head, and a polyimide liquid supply tank, wherein the inkjet head is configured to jet the polyimide liquid in a scan-coating and be shifted by a predetermined shift pitch in a direction until 2N times of scan-coating occurs in which N>=2 and N is a natural number. A method for coating polyimide layer includes placing a substrate, loading a polyimide liquid vessel into a polyimide liquid supply tank, jetting the polyimide liquid onto the substrate in a scan-coating, repeating the jetting the polyimide liquid onto the substrate in a scan-coating and the shifting the inkjet head by a predetermined shift pitch until 2N times of scan-coating occurs in which N>=2 and N is a natural number.