Electrode for phase change memory device and method

• Main Author: COTE DONNA R.,MAUTHE RONALD W.,WONG KEITH K. H
• Format: Patent
• Language: English
• Published: 12.09.2007
• Subjects: ELECTRICITY

An electrode for a memory material of a phase change memory device is disclosed. The electrode includes a first layer adhered to the memory material, the first layer including a nitride (ANx), where A is one of titanium (Ti) and tungsten (W) and x greater than zero, but is less than 1.0, and a secon...