Semiconductor device
A trench is formed on a semiconductor substrate. The trench is provided with a gate electrode part wherein a gate electrode is arranged, and a gate extracting part with which wiring for electrically connecting the gate electrode with the external is brought into contact. In the gate extracting part...
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Main Author | |
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Format | Patent |
Language | English |
Published |
05.09.2007
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Subjects | |
Online Access | Get full text |
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Summary: | A trench is formed on a semiconductor substrate. The trench is provided with a gate electrode part wherein a gate electrode is arranged, and a gate extracting part with which wiring for electrically connecting the gate electrode with the external is brought into contact. In the gate extracting part for electrically connecting the gate electrode with the external, the width of an end part of the trench is formed wider than that of other parts. |
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Bibliography: | Application Number: CN2005833111 |