Treating agent materials

A treating agent composition for increasing the hydrophobicity of an organosilicate glass dielectric film when applied to said film. It includes a component capable of alkylating or arylating silanol moieties of the organosilicate glass dielectric film via silylation, and an activating agent which m...

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Bibliographic Details
Main Author BHANAP ANIL S.,KOROLEV BORIS A.,LEUNG ROGER Y.,MUNOZ BETH C.,RAMOS TERESA A.,ROTH ROBERT R.,APEN PAUL G.,ENDISCH DENIS H.,DANIELS BRIAN J.,NAMAN ANANTH,IWAMOTO NANCY
Format Patent
LanguageEnglish
Published 08.08.2007
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:A treating agent composition for increasing the hydrophobicity of an organosilicate glass dielectric film when applied to said film. It includes a component capable of alkylating or arylating silanol moieties of the organosilicate glass dielectric film via silylation, and an activating agent which may be an acid, a base, an onium compound, a dehydrating agent, and combinations thereof, and an optional solvent or mixture of a main solvent and a co-solvent.
Bibliography:Application Number: CN200580030450