Chip bench of plasma reinforced thin film deposition device
The invention discloses a substrate table in the reinforced plasma depositing film device, which comprises the following parts: sealed hollow disc, fixed support, heating pipe and temperature sensor, wherein the sealed hollow disc is connected by substrate board, lateral board, chassis and insulated...
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Main Author | |
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Format | Patent |
Language | English |
Published |
08.08.2007
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Subjects | |
Online Access | Get full text |
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