Equipment for manufacturing liquid crystal display

• Main Authors: KIM YONG-HOON, SO CHIN U, KWAK SSNG-MIN
• Format: Patent
• Language: Chinese; English
• Published: 24.02.2010
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; CINEMATOGRAPHY; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; HOLOGRAPHY; MATERIALS THEREFOR; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; SEMICONDUCTOR DEVICES; TECHNICAL SUBJECTS COVERED BY FORMER USPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ARTCOLLECTIONS [XRACs] AND DIGESTS

An apparatus for manufacturing a liquid crystal display device is disclosed. The invention provides an exposure structure for manufacturing a liquid crystal display device, which adjusts a base plateto a proper temperature during adjusting exposure process, reduces the period and minimizes the occupied time. The structure comprises a transfer conveyor for conveying the base plate; a first robot arm at a loading side of the thru-conveyor for receiving a substrate coated with photoresist and conveys the substrate to a thru-conveyor; a softbake hot plate (SHP) at the unloading side of the thru-conveyor for removing solvent from the substrate; a cool plate which lowers the substrate temperature from which the solvent is removed; a buffer temporarily which stores the substrate having the lowered temperature; a second robot arm between the thru-conveyor, the SHP, the cool plate and a loading side of the buffer, for loading/unloading the substrate; a temperature control unit which adjusts the substrate temperature u