Dual technology (confocal and intererometric) optical profilometer

The device comprises a light source (LED), beam splitters (at least one of which is polarising), illumination pattern generating means (LCOS micro-display) and interchangeable microscope lenses that are conventional lenses that may be used to obtain confocal images and interferometric lenses that ma...

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Bibliographic Details
Main Authors LAGUARTA BERTRAN FERRAN, CADEVALL ARTIGUES CRISTINA, ARTIGAS PURSALS ROGER
Format Patent
LanguageChinese
English
Published 10.06.2009
Subjects
DIAGNOSIS
HUMAN NECESSITIES
HYGIENE
IDENTIFICATION
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
MEDICAL OR VETERINARY SCIENCE
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
SURGERY
TESTING
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Summary:The device comprises a light source (LED), beam splitters (at least one of which is polarising), illumination pattern generating means (LCOS micro-display) and interchangeable microscope lenses that are conventional lenses that may be used to obtain confocal images and interferometric lenses that may be used to obtain interferometric images. The micro-display can generate a sequence of illumination patterns to obtain confocal images, or total opening of all the illumination pixels to obtain interferometric images. The design is compact and allows rapid measurement, with no contact, of the shape and texture of all types of surfaces on the micrometric and nanometric scales, including structured or stratified samples containing dissimilar materials.
Bibliography:Application Number: CN200580012715