Semiconductor wafer
A semiconductor die having an integrated circuit region formed in a substrate comprises at least one die-corner-circuit-forbidden (DCCF) region disposed in the substrate, proximate to the integrated circuit region; and at least one registration feature formed within the at least one DCCF region. The...
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Main Authors | , , , |
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Format | Patent |
Language | Chinese English |
Published |
16.04.2008
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Subjects | |
Online Access | Get full text |
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Summary: | A semiconductor die having an integrated circuit region formed in a substrate comprises at least one die-corner-circuit-forbidden (DCCF) region disposed in the substrate, proximate to the integrated circuit region; and at least one registration feature formed within the at least one DCCF region. The at least one registration feature comprises a structure selected from the group consisting of a laser fuse mark, an alignment mark, and a monitor mark. |
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Bibliography: | Application Number: CN200510115701 |