Electrostatic actuator formed by a semiconductor manufacturing process
An approach applying a semiconductor manufacturing process in the manufacturing of an electrostatic actuator, such as for a droplet discharging head, liquid supply cartridge, inkjet recording apparatus and/or liquid jet apparatus, is provided. Such electrostatic actuator has high-reliability and les...
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Main Author | |
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Format | Patent |
Language | English |
Published |
03.10.2007
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Subjects | |
Online Access | Get full text |
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Summary: | An approach applying a semiconductor manufacturing process in the manufacturing of an electrostatic actuator, such as for a droplet discharging head, liquid supply cartridge, inkjet recording apparatus and/or liquid jet apparatus, is provided. Such electrostatic actuator has high-reliability and less variation in characteristics. |
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Bibliography: | Application Number: CN20038022109 |