Electrostatic actuator formed by a semiconductor manufacturing process

An approach applying a semiconductor manufacturing process in the manufacturing of an electrostatic actuator, such as for a droplet discharging head, liquid supply cartridge, inkjet recording apparatus and/or liquid jet apparatus, is provided. Such electrostatic actuator has high-reliability and les...

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Bibliographic Details
Main Author NISHIMURA MANABU,KURODA TAKAHIKO,ABE SHUYA,TANAKAMAKOTO,IRINODA MITSUGU,HASHIMOTO KENICHIROH
Format Patent
LanguageEnglish
Published 03.10.2007
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Summary:An approach applying a semiconductor manufacturing process in the manufacturing of an electrostatic actuator, such as for a droplet discharging head, liquid supply cartridge, inkjet recording apparatus and/or liquid jet apparatus, is provided. Such electrostatic actuator has high-reliability and less variation in characteristics.
Bibliography:Application Number: CN20038022109