Spin coating apparatus and coated substrate manufactured using the same
PURPOSE: A spin coating device and a coating material fabricated by the spin coating device are provided to spin-coat a surface of a material, thereby reducing a ski-jump phenomenon occurring in an end section of the material while preventing the material from being polluted by a coating material. C...
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Main Author | |
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Format | Patent |
Language | English |
Published |
29.08.2007
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Subjects | |
Online Access | Get full text |
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Summary: | PURPOSE: A spin coating device and a coating material fabricated by the spin coating device are provided to spin-coat a surface of a material, thereby reducing a ski-jump phenomenon occurring in an end section of the material while preventing the material from being polluted by a coating material. CONSTITUTION: A ring-shaped or polygonal-shaped member has an upper side(40a) having an inclination, and wherein an inner part of the inclination is adjacent to or contacted with an end section of a material when the material is mounted. The inclination of the upper side(40a) externally gets lowered from a center. A support(40) is further comprised to mount the material. An empty space(40d) is formed between the material and the support(40) to expose an opposite side of a spin coating side. |
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Bibliography: | Application Number: CN2004801545 |