RESONANT FREQUENCY BASED PRESSURE SENSOR

A pressure sensor (10) for sensing a pressure of a process fluid includes a sensor body (23) exposed to the pressure of the process fluid. The sensor body (23) deforms in response to the pressure. A diaphragm (16) suspended from the sensor body (23) has a tension which changes in response to deforma...

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Bibliographic Details
Main Authors KLOSINSKI, ANDREW J, WILLCOX, CHARLES R
Format Patent
LanguageEnglish
French
Published 21.04.2015
Subjects
MEASURING
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE
PHYSICS
TESTING
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Summary:A pressure sensor (10) for sensing a pressure of a process fluid includes a sensor body (23) exposed to the pressure of the process fluid. The sensor body (23) deforms in response to the pressure. A diaphragm (16) suspended from the sensor body (23) has a tension which changes in response to deformation of the sensor body (23). A resonate frequency of the diaphragm (16) is measured. The measured resonant frequency is indicative of the line pressure of the process fluid and integrity of the isolation fill fluid system. In addition to measuring the resonant frequency, the oscillation mode itself can be used as a diagnostic tool to assess sensor health.
Bibliography:Application Number: CA20112794456