CURRENT CHANGE LIMITING DEVICE

In a method of limiting the current (I out) flowing between a plasma chamber (3) and a power supply (2), wherein the current change di/dt is limited if the current exceeds a predetermined current by a by a current change limiting device (7, 40) which is provided in the current path between the power...

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Bibliographic Details
Main Authors OZIMEK, PAWEL, KLIMCZAK, ANDRZEJ, BUGYI, RAFAL
Format Patent
LanguageEnglish
French
Published 12.04.2016
Subjects
BASIC ELECTRIC ELEMENTS
CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
EMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS
GENERATION
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Summary:In a method of limiting the current (I out) flowing between a plasma chamber (3) and a power supply (2), wherein the current change di/dt is limited if the current exceeds a predetermined current by a by a current change limiting device (7, 40) which is provided in the current path between the power supply (2) and the plasma chamber (3). Dans une méthode de limitation dintensité du courant (I sortant) circulant entre une chambre de plasma (3) et une source dalimentation (2), la variation dintensité du courant di/dt est limitée si lintensité du courant dépasse une intensité de courant prédéterminée par un dispositif de limitation de variation dintensité du courant (7, 40) qui est présent sur le parcours de courant entre la source dalimentation (2) et la chambre de plasma (3).
Bibliography:Application Number: CA20082646522