SEMICONDUCTOR DIFFERENTIAL PRESSURE MEASURING DEVICE

• Main Authors: WATANABE, TETSUYA, IKEDA, KYOICHI, YOSHIDA, TAKASHI, TSUKAMOTO, HIDEO, FUKUHARA, SATOSHI
• Format: Patent
• Language: English; French
• Published: 05.09.2000
• Edition: 6
• Subjects: MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; PHYSICS; TESTING

This is a semiconductor differential pressure measuring device comprising two measurement diaphragms and two detection sensors provided in a semiconductor substrate using micromachining techniques, and a computing circuit which computes the differences between these two sensor outputs: for each of the two measurement diaphragms, the measuring pressure transmission communicating hole being provided respectively so that these two measurement diaphragms operate in opposite phases by the differential pressure; and the above two sensors being provided on each relevant measurement diaphragm and detecting the displacement or strain of each measurement diaphragm generated by the differential pressure applied to each measurement diaphragm. Detecting the differences in the displacement or strain of each of these two measurement diaphragms cancels the static pressure error and temperature error and, thus, offers a semiconductor differential pressure measuring device which is excellent in temperature and static pressure characteristics. Further, the computing circuit can be configured simply by composing a required bridge circuit using at least one first sensor and one second sensor, each located on each of the two measurement diaphragms, leading to a reduction in manufacturing costs.