INTEGRATED HEATABLE SENSOR

(57) The invention concerns a sensor construction for, e.g., the measurement of gas concentration, comprising a sensor element (8, 10); a heating element (11) arranged in conjunction with the sensor, with which the sensor element can be brought to a temperature above the ambient gas atmosphere tempe...

Full description

Saved in:
Bibliographic Details
Main Author LEHTO, ARI
Format Patent
LanguageEnglish
French
Published 06.07.1993
Edition5
Subjects
CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
MEASURING
PHYSICS
PRINTED CIRCUITS
TESTING
Online AccessGet full text

Cover

More Information
Summary:(57) The invention concerns a sensor construction for, e.g., the measurement of gas concentration, comprising a sensor element (8, 10); a heating element (11) arranged in conjunction with the sensor, with which the sensor element can be brought to a temperature above the ambient gas atmosphere temperature; and an electronics circuitry section (18), with which the desired electrical properties of the sensor element (8, 10) can be measured and the heating element (11) of the sensor (8, 10) can be controlled. According to the invention, the sensor element (8, 10) and the electronics circuitry (18) are placed onto the same planar substrate, and the substrate (1, 7) is processed to have adjacent openings around the sensor element area (8, 10) to the immediate vicinity of the area so that the openings (5, 13, 17) extend through the substrate (1, 7), whereby the sensor area (8, 10) is connected to the surrounding part of the substrate and, thence, to the electronics circuitry section (18), only along thin isthmuses (14) remaining between the openings. (Figure 1)
Bibliography:Application Number: CA19890599946