PROCESS AND APPARATUS FOR SUPPORTING CRYSTALLINE WAFERS

The invention relates to a process and apparatus for supporting crystalline wafers utilizing the suction effect of flowing gas on the crystalline wafers. An almost pointlike support of the crystalline wafer is achieved. Furthermore, the invention relates to a holding tool for carrying out the proces...

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Bibliographic Details
Main Authors SCHIELE, BERND, NIEDERMEIER, JOHANN
Format Patent
LanguageEnglish
French
Published 06.11.1984
Edition3
Subjects
BASIC ELECTRIC ELEMENTS
BORING
COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT
CONVEYING
DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HANDLING THIN OR FILAMENTARY MATERIAL
MACHINE TOOLS
MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS
METAL-WORKING NOT OTHERWISE PROVIDED FOR
PACKING
PERFORMING OPERATIONS
PNEUMATIC TUBE CONVEYORS
SEMICONDUCTOR DEVICES
SHOP CONVEYOR SYSTEMS
STORING
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING
TRANSPORTING
TURNING
WORKING CEMENT, CLAY, OR STONE
WORKING STONE OR STONE-LIKE MATERIALS
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Summary:The invention relates to a process and apparatus for supporting crystalline wafers utilizing the suction effect of flowing gas on the crystalline wafers. An almost pointlike support of the crystalline wafer is achieved. Furthermore, the invention relates to a holding tool for carrying out the process, which tool has at the center of the holding face, a point-like projection.
Bibliography:Application Number: CA19810386520