MANUFACTURE OF A GROUP OF INFRA-RED DETECTOR ELEMENTS, AND A GROUP SO MANUFACTURED

• Main Authors: BAKER, IAN M, WITHERS, RICHARD B
• Format: Patent
• Language: English; French
• Published: 22.03.1983
• Edition: 3
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; SEMICONDUCTOR DEVICES; TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION; TECHNICAL SUBJECTS COVERED BY FORMER USPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS

1 PHB. 32,630. A group of infra-red radiation detector elements are manufactured from a body of infra-red sensitive materials on an insulating substrate using two masking steps which do not require critical alignment even with close spacing between the elements. A first masking layer e.g. of photoresist is formed on the upper surface of at least the body to determine by a lift-off technique a metallization pattern on the body and the substrate. A second masking layer e.g. of photoresist is then provided to determine by ion-bombardment through windows of this layer the desired pattern of elements and their electrodes. The ion-bombardment permits removal of exposed areas of not just the body and metallization pattern but also of a passivating layer on the body surfaces; a closely spaced group of elements and their electrodes can be obtained because the ion-bombardment results in steep sides without significant undercutting.