Magnetsystem, Sputtervorrichtung und Verfahren

• Main Authors: SANDER THORSTEN, GROSSER GÖTZ, SCHNEIDER KLAUS, HAUSWALD RALF
• Format: Patent
• Language: German
• Published: 22.05.2023
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

Gemäß verschiedenen Ausführungsformen kann ein Magnetsystem (100) für eine Sputtervorrichtung (300) aufweisen: ein Gehäuse (406g), welches einen Gehäuseinnenraum (406h) aufweist; einen Magnetträger (102), welcher in dem Gehäuseinnenraum (406h) angeordnet und mittels des Gehäuses (406g), vorzugsweise ortsfest zu diesem, abgestützt ist; eine Entfeuchtungsvorrichtung, welche an den Gehäuseinnenraum (406h) angrenzt oder darin angeordnet ist, zum Trocknen des Gehäuseinnenraums (406h). Disclosed herein are systems, devices, and methods for a magnet system for a sputtering device. The disclosed magnet system may include a housing having a housing interior. The magnet system may also include a magnet holder disposed in the housing interior and supported by the housing in a preferably stationary manner. The magnet system may also include a dehumidifying device adjacent to or disposed in the housing interior for drying the housing interior.