Fabrication of semiconductor devices with air gaps for ultra low capacitance interconnections and methods of making same

Saved in:
Bibliographic Details
Main Authors CLIFFORD LEE HENDERSON, DHANANJAY M. BHUSARI, SUE ANN BIDSTRUP ALLEN, PAUL ALBERT KOHL, HOLLIE ANNE REED
Format Patent
LanguageEnglish
Published 13.03.2002
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
Online AccessGet full text

Cover

Author CLIFFORD LEE HENDERSON
DHANANJAY M. BHUSARI
PAUL ALBERT KOHL
SUE ANN BIDSTRUP ALLEN
HOLLIE ANNE REED
Author_xml – fullname: CLIFFORD LEE HENDERSON
– fullname: DHANANJAY M. BHUSARI
– fullname: SUE ANN BIDSTRUP ALLEN
– fullname: PAUL ALBERT KOHL
– fullname: HOLLIE ANNE REED
BookMark eNqFzE0KwjAQBeAsdOHfGZwLCBZBui1i8QC6LmMybQebSUmm1uPbgntXb_He-9ZmIUFoZT4lPiNbVA4CoYZEnm0QN1gNERy92VKCkbUF5AgN9gnqqRk6jQhdGMFij5YVxRKwKMXpLmRnMAGKA0_aBpdm3eOLpYGEnrZmWWOXaPfLjdmX1_vldqA-VJQmk4S0Kh55fs7Ox6w4_V98AVSsR6Y
ContentType Patent
DBID EVB
DatabaseName esp@cenet
Database_xml – sequence: 1
  dbid: EVB
  name: esp@cenet
  url: http://worldwide.espacenet.com/singleLineSearch?locale=en_EP
  sourceTypes: Open Access Repository
DeliveryMethod fulltext_linktorsrc
Discipline Medicine
Chemistry
Sciences
Edition 7
ExternalDocumentID AU8861601A
GroupedDBID EVB
ID FETCH-epo_espacenet_AU8861601A3
IEDL.DBID EVB
IngestDate Fri Jul 19 12:23:20 EDT 2024
IsOpenAccess true
IsPeerReviewed false
IsScholarly false
Language English
LinkModel DirectLink
MergedId FETCHMERGED-epo_espacenet_AU8861601A3
Notes Application Number: AU20010088616
OpenAccessLink https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20020313&DB=EPODOC&CC=AU&NR=8861601A
ParticipantIDs epo_espacenet_AU8861601A
PublicationCentury 2000
PublicationDate 20020313
PublicationDateYYYYMMDD 2002-03-13
PublicationDate_xml – month: 03
  year: 2002
  text: 20020313
  day: 13
PublicationDecade 2000
PublicationYear 2002
RelatedCompanies GEORGIA TECH RESEARCH CORPORATION
RelatedCompanies_xml – name: GEORGIA TECH RESEARCH CORPORATION
Score 2.5465963
SourceID epo
SourceType Open Access Repository
SubjectTerms BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
Title Fabrication of semiconductor devices with air gaps for ultra low capacitance interconnections and methods of making same
URI https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20020313&DB=EPODOC&locale=&CC=AU&NR=8861601A
hasFullText 1
inHoldings 1
isFullTextHit
isPrint
link http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwdV1NT8JAEJ0gGvWmqMHvOZjeGimlHxyIgZaGmAjEgOFGdtsFSaAlbQn-fGdXql64Ndtk0t3N68zsvnkD8OQ4FCPbTabX3dDSG3U201mNmbrh0m5bhikioVi-fbs3brxOrEkJPotaGKUTulXiiISokPCeq__1-u8Qy1fcyuyZL2goeQlGLV8rsuO6lCLU_E6rOxz4A0_zPMoktf57y3Vtg3KP9gEcUhDtSCx0PzqyJmX936EEZ3A0JFtxfg4lEVfgxCv6rlXg-G133U2PO-RlF_AVMJ7uPg2TGWaS1J7EUq01STESCvAoT1WRLVKcs3WGFI_iZpmnDJfJFkNyi-Eil7uMUiQiDSXHRZU1ZMjiCH-aSWfS-kr1qMKMrcQlPAbdkdfTaQrT39WatsfFXM0rKMdJLKqAtbAWNS2KbxzOGjPmNAWPOCVHDrNtbvDoGqr7rNzsf3ULp6o5iqS3mXdQztONuCcfnfMHtbzfa4KZow
link.rule.ids 230,309,783,888,25576,76882
linkProvider European Patent Office
linkToHtml http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwdV1LT8JAEJ4gGvGmqMEnezC9NVJKHxyIgZYGlVcMGG5kt90qCbSkLcGf7-xK1Qu3ZptMuruZzszuN98H8GBZmCObTarWbd9QG3UaqrRGdVWzcbcNTecBlyjfodmbNl5mxqwAn3kvjOQJ3UpyRPQoH_09k__r9d8hliuxlekjW-BQ_ORNWq6SV8d1QUWouJ1WdzxyR47iOFhJKsO3lm2bGtYe7QM4xATbFloH3feO6ElZ_w8o3ikcjdFWlJ1BgUdlKDm57loZjge762583Hleeg5fHmXJ7tNIHJJUgNrjSLC1xgkJuHR4Ik5VCV0k5IOuU4L5KNkss4SSZbwlPoZFf5GJXSaCJCLxBcZFtjWkhEYB-RGTToX1ldSoIild8Quoet2J01NxCvPf1Zq3p_lc9UsoRnHEK0Bqfi1oGpjfWIw2Qmo1OQsYFkcWNU2mseAKKvusXO9_VYVSbzLoz_vPw9cbOJFCKQLqpt9CMUs2_A7jdcbu5VJ_A8lbnJM
openUrl ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Apatent&rft.title=Fabrication+of+semiconductor+devices+with+air+gaps+for+ultra+low+capacitance+interconnections+and+methods+of+making+same&rft.inventor=CLIFFORD+LEE+HENDERSON&rft.inventor=DHANANJAY+M.+BHUSARI&rft.inventor=SUE+ANN+BIDSTRUP+ALLEN&rft.inventor=PAUL+ALBERT+KOHL&rft.inventor=HOLLIE+ANNE+REED&rft.date=2002-03-13&rft.externalDBID=A&rft.externalDocID=AU8861601A