Fabrication of semiconductor devices with air gaps for ultra low capacitance interconnections and methods of making same

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Bibliographic Details
Main Authors CLIFFORD LEE HENDERSON, DHANANJAY M. BHUSARI, SUE ANN BIDSTRUP ALLEN, PAUL ALBERT KOHL, HOLLIE ANNE REED
Format Patent
LanguageEnglish
Published 13.03.2002
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Bibliography:Application Number: AU20010088616