Apparatus and method for performing end point detection on a linear planarization tool

Saved in:
Bibliographic Details
Main Authors BRIAN THORNTON, ANIL K. PANT, ROBERT G. BOEHM JR, WILBUR C. KRUSELL, ANDREW J. NAGENGAST
Format Patent
LanguageEnglish
Published 22.05.2000
Edition7
Subjects
DRESSING OR CONDITIONING OF ABRADING SURFACES
FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
GRINDING
MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING
PERFORMING OPERATIONS
POLISHING
TRANSPORTING
Online AccessGet full text

Cover

More Information
Bibliography:Application Number: AU19990064257