PROTECTION OF INTERCONNECTS AND DEVICES IN A PACKAGED QUANTUM BIT STRUCTURE
A device (500) comprises a first chip (508) having a first chip front-side and a first chip back-side, a qubit chip (504) having a qubit chip front-side and a qubit chip back-side, the qubit chip front-side operatively coupled to the first chip front-side with a set of bump-bonds (506), a set of thr...
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Main Authors | , , , |
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Format | Patent |
Language | English |
Published |
11.07.2024
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Subjects | |
Online Access | Get full text |
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Summary: | A device (500) comprises a first chip (508) having a first chip front-side and a first chip back-side, a qubit chip (504) having a qubit chip front-side and a qubit chip back-side, the qubit chip front-side operatively coupled to the first chip front-side with a set of bump-bonds (506), a set of through-silicon vias (TSVs) connected to at least one of the first chip back-side or the qubit chip back-side, and a cap wafer (502) that is metal bonded to at least one of the qubit chip back-side or the first chip back-side. Preferably, the qubits and the TSVs are superconducting, and the cap wafer features a cavity that comprises a metal coating on its inside surface for electromagnetic shielding. |
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Bibliography: | Application Number: AU20210399002 |