PROTECTION OF INTERCONNECTS AND DEVICES IN A PACKAGED QUANTUM BIT STRUCTURE

A device (500) comprises a first chip (508) having a first chip front-side and a first chip back-side, a qubit chip (504) having a qubit chip front-side and a qubit chip back-side, the qubit chip front-side operatively coupled to the first chip front-side with a set of bump-bonds (506), a set of thr...

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Bibliographic Details
Main Authors COTTE, John, PETRARCA, Kevin Shawn, ABRAHAM, David, DIAL, Oliver
Format Patent
LanguageEnglish
Published 11.07.2024
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Summary:A device (500) comprises a first chip (508) having a first chip front-side and a first chip back-side, a qubit chip (504) having a qubit chip front-side and a qubit chip back-side, the qubit chip front-side operatively coupled to the first chip front-side with a set of bump-bonds (506), a set of through-silicon vias (TSVs) connected to at least one of the first chip back-side or the qubit chip back-side, and a cap wafer (502) that is metal bonded to at least one of the qubit chip back-side or the first chip back-side. Preferably, the qubits and the TSVs are superconducting, and the cap wafer features a cavity that comprises a metal coating on its inside surface for electromagnetic shielding.
Bibliography:Application Number: AU20210399002