Microneedle, microcone, and photolithography fabrication methods

• Main Authors: JEONG, Dohyeon, KIM, Jung Dong, KIM, Jungkwun, LEE, Keun Ho
• Format: Patent
• Language: English
• Published: 28.07.2022
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; CINEMATOGRAPHY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS

Lithography fabrication methods for producing polymeric microneedles, microprobes, and other micron-sized structures with sharp tips. The fabrication process utilizes a single-step bottom-up exposure of photosensitive resin through a photomask micro-pattern, with a corresponding change/increase in r...