Optical system and interference objective module therof

Provided herein are interference objective modules comprising an objective, and an interference module comprising a reference plate disposed apart from the objective to provide a reference arm, a beam splitter to split a source light processed from the objective, and a sample plate to translate the...

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Bibliographic Details
Main Author HO, Tuan-Shu
Format Patent
LanguageEnglish
Published 07.04.2022
Subjects
DIAGNOSIS
HUMAN NECESSITIES
HYGIENE
IDENTIFICATION
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
MEDICAL OR VETERINARY SCIENCE
PHYSICS
SURGERY
TESTING
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Summary:Provided herein are interference objective modules comprising an objective, and an interference module comprising a reference plate disposed apart from the objective to provide a reference arm, a beam splitter to split a source light processed from the objective, and a sample plate to translate the split light from the beam splitter to provide a sample arm, wherein the interference module is configured to make a distance of a focal plane and an interference plane of the interference objective module varied during a measurement, and wherein the focal plane and the interference plane of the interference objective module intersect during the measurement.
Bibliography:Application Number: AU20200368606