Combination preparation process and combination preparation system for zirconia and methylchlorosilane and/or polysilicon

• Main Authors: WU, Zhufeng, YIN, Bo, HUANG, Bin, FAN, Xiecheng, CHEN, Guohui, LIU, Xingping
• Format: Patent
• Language: English
• Published: 01.09.2022
• Subjects: ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAININGELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN,SULFUR, SELENIUM OR TELLURIUM; CHEMISTRY; COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSESC01D OR C01F; INORGANIC CHEMISTRY; METALLURGY; ORGANIC CHEMISTRY

Provided are a combination preparation process and a combination preparation system for zirconia and methylchlorosilane and/or polysilicon. The process comprises: using zircon sand, carbon as a reducing agent, chlorine gas, silicon as a heating supplementation agent, and hydrogen chloride as raw materials to prepare zirconia, wherein a product separated during the preparation of zirconia comprises a gas phase substance and a liquid phase substance; and the gas phase substance separated during the preparation of zirconia is used as a raw material to prepare methylchlorosilane, and the liquid phase substance is used as a raw material to prepare polysilicon. In the present invention, not only are waste gases, such as carbon monoxide and hydrogen chloride, which are produced during the preparation of zirconia, used as raw materials to prepare methylchlorosilane, but a by-product, silicon tetrachloride, which is produced during the preparation of zirconia, is used as a raw material to prepare polysilicon, thereby effectively recycling the waste gases and silicon tetrachloride, said recycling having a high value, reducing the treatment cost of the waste gases and the silicon tetrachloride, and preventing environmental pollution, and also reducing the production cost of methylchlorosilane and polysilicon, improving the process level, and improving the overall economic benefit.