Method of making a Josephson junction based superconductor device

The disclosed method of forming a Josephson junction (JJ) based superconductor device structure comprises forming a base electrode (18) in a first dielectric layer (16) with coplanar surfaces, preferably by a damascene process, forming a junction material stack over the base electrode, forming a har...

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Bibliographic Details
Main Authors Rennie, Michael, Kirby, Christopher F, O'Donnell, Daniel J
Format Patent
LanguageEnglish
Published 18.04.2019
Subjects
ELECTRICITY
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Summary:The disclosed method of forming a Josephson junction (JJ) based superconductor device structure comprises forming a base electrode (18) in a first dielectric layer (16) with coplanar surfaces, preferably by a damascene process, forming a junction material stack over the base electrode, forming a hardmask (34) over the junction material stack, etching away a portion of the junction material stack to form the JJ (24), depositing a second dielectric layer (22), and forming a first contact (26) through the second dielectric layer to the base electrode and a second contact (28) through the second dielectric layer and the hardmask, preferably by a dual damascene process.
Bibliography:Application Number: AU20170360504