Josephson junction superconductor device interconnect

• Main Authors: Graninger, Aurelius L, Rennie, Michael, Kirby, Christopher F
• Format: Patent
• Language: English
• Published: 10.10.2019
• Subjects: ELECTRICITY

The disclosed method of forming a Josephson junction (JJ) based superconductor device interconnect structure includes forming a base electrode (18) in a coplanar first dielectric layer (16), preferably by a damascene process, depositing a second dielectric layer (20) thereon, forming a first contact...