Method and apparatus for deriving a topograpy of an object surface

The embodiments herein relate to a method for deriving topography of an object surface (3). A linearly polarized light wave (102a, 103a) is directed towards the object surface (3) and a reference surface (2). Images of reflected linearly polarized light wave (102b, 103b) for a plurality of wavelengt...

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Bibliographic Details
Main Author Bååth, Lars
Format Patent
LanguageEnglish
Published 12.04.2018
Subjects
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
TESTING
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Summary:The embodiments herein relate to a method for deriving topography of an object surface (3). A linearly polarized light wave (102a, 103a) is directed towards the object surface (3) and a reference surface (2). Images of reflected linearly polarized light wave (102b, 103b) for a plurality of wavelengths are obtained. The images are obtained for at least four polarizations for each of the plurality of wavelengths. The reflected linearly polarized light wave (102b, 103b) is a reflection of the linearly polarized light wave (102a, 103a) directed towards the object surface (3) and the reference surface (2). The topography of the object surface (3) based on the obtained images is obtained.
Bibliography:Application Number: AU20150406086