Plasma generator using dielectric resonator

A dielectric resonator is excited at its natural resonant frequency to produce highly uniform electric field for the generation of plasma. The plasma may be used optical or mass spectrometer.

Saved in:
Bibliographic Details
Main Authors Pikelja, Velibor, Menon, Ashok, Jevtic, Jovan
Format Patent
LanguageEnglish
Published 15.02.2018
Subjects
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
PLASMA TECHNIQUE
PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS
PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS
Online AccessGet full text

Cover

More Information
Summary:A dielectric resonator is excited at its natural resonant frequency to produce highly uniform electric field for the generation of plasma. The plasma may be used optical or mass spectrometer.
Bibliography:Application Number: AU20140240385