ONE-WAFER CYCLIC SCHEDULING OF HYBRID MULTI-CLUSTER TOOLS IN SEMICONDUCTOR MANUFACTURING

• Main Authors: QIAO, YAN, WU, NAIQI, YANG, FAJUN, ZHOU, MENGCHU
• Format: Patent
• Language: English
• Published: 10.07.2014
• Subjects: BASIC ELECTRIC ELEMENTS; CONTROL OR REGULATING SYSTEMS IN GENERAL; CONTROLLING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS; PHYSICS; REGULATING; SEMICONDUCTOR DEVICES

A method to provide an optimal one-wafer cyclic schedule for scheduling a multi cluster tool containing single- and double-arm robots is provided. In the method, a Petri net for modeling the multi-cluster tool is first developed. With this model, the conditions under which individual cluster tools c...