ONE-WAFER CYCLIC SCHEDULING OF HYBRID MULTI-CLUSTER TOOLS IN SEMICONDUCTOR MANUFACTURING

A method to provide an optimal one-wafer cyclic schedule for scheduling a multi cluster tool containing single- and double-arm robots is provided. In the method, a Petri net for modeling the multi-cluster tool is first developed. With this model, the conditions under which individual cluster tools c...

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Bibliographic Details
Main Authors QIAO, YAN, WU, NAIQI, YANG, FAJUN, ZHOU, MENGCHU
Format Patent
LanguageEnglish
Published 10.07.2014
Subjects
BASIC ELECTRIC ELEMENTS
CONTROL OR REGULATING SYSTEMS IN GENERAL
CONTROLLING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
FUNCTIONAL ELEMENTS OF SUCH SYSTEMS
MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS
PHYSICS
REGULATING
SEMICONDUCTOR DEVICES
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Summary:A method to provide an optimal one-wafer cyclic schedule for scheduling a multi cluster tool containing single- and double-arm robots is provided. In the method, a Petri net for modeling the multi-cluster tool is first developed. With this model, the conditions under which individual cluster tools can operate in a paced way are derived. Based on them, it is shown that there is always a one-wafer cyclic schedule for the multi-cluster tool. Algorithms to find the minimal cycle time and the optimal one-wafer cyclic schedule are developed. The method is computationally efficient and easy-to-implement in practice. Examples are given to show the application and effectiveness of the method. Abstract figure: FIG. 1 Docket No.: UM1142AUOO 33 -4-.4 oL
Bibliography:Application Number: AU20140100514